In recent years, with the rapid development trend of electronic industry production, the influence of electronic gas in semiconductor chips has become increasingly prominent. The theoretical "electronic gas" refers to the gas used in the electronics industry and is one of the most important raw materials. The category "electronic gas" refers to the special gas used for electronic semiconductor chips. In the "Classification of Strategic Emerging Industries (2018)", the most important part of the production and manufacturing of electronic special raw materials, electronic gases are divided into electronic special gases and electronic bulk commodity gases. Electronic special gases are essential and vital chemical raw materials in the whole process of semiconductor chip production and processing such as integrated power supply circuits, flat panel displays, light-emitting diodes, and solar panels. They are commonly used for cleaning, etching, demulsification, and inclusions. And other processing technology. In the semiconductor material processing technology, from the growth and development of the integrated IC to the packaging of the final components, basically every step and every stage is inseparable from the electronic special gas, so the electronic gas is called the "grain" and "source" of semiconductor devices. ".

The plan view shows the information manufacturing industry; electronic gases are dominated by silicon group gases such as silane, inclusion gases such as PH3, and etching process gases such as SF6. In the plastic film process, SiO2, SiNx and other plastic films are deposited on the glass substrate according to the organic chemical liquid phase deposition. The special gases used are SiH4, PH3, NH3, NF3, etc. In the dry etching process, the plate can be selectively etched in a low-temperature plasma vapor atmosphere. Generally use SF6, HCl, Cl2 and other gases.

Solar panel manufacturing industry; in the production of crystalline silicon cells, the diffusion process uses POCl3 and O2, the anti-reflection layer plasma technology improves the organic chemical liquid deposition (PECVD) process using SiH4, NH3, and the etching process uses CF4. Solar thin-film rechargeable batteries use diethyl zinc (DEZn) and B2H6 in the process of depositing fully transparent conductive film, and use silane in the process of deposition of amorphous/nano-microcrystalline silicon.

Integrated circuit manufacturing industry; similar to the original manufacturing industry of plan view, it is generally used in CVD, etching and other manufacturing stages. However, because the regulations and complexity of integrated circuit manufacturing and plan view display information are different, integrated circuits The electronic gas necessary for manufacturing has higher purity and a large number of types.

The integrated circuit industry is the key main use of electronic gas. According to the data from the Prospect Industry Research Institute, in my country's total sales of specialty gases, the electronics manufacturing industry accounts for about 41%, petrochemical equipment accounts for about 39%, diagnosis and treatment environmental protection accounts for about 10%, and other industries account for about 10%. In the pure electronic gas industry, the integrated circuit industry has a share of 42%, which is a relatively large electronic gas consuming industry. The second is the display information control panel industry, with a share of about 37%. Ultimately, the solar power industry and the LED industry have respective share of 13% and 8%.

Electronic gases used in the integrated circuit industry chain can be divided into two categories: bulk commodity gases (common gases) and unique gases. Commodity gases are generally dominated by pure gases such as N2 (N2), co2 (O2), argon (Ar), helium (He), and radon (H2). Commodity gases have two key roles in semiconductor equipment. One is to reflect the gas participating in chemical changes, such as radon and co2. The other is a plastic gas used as a maintenance gas. It is often used in the whole process of high-temperature baking or cleaning. This gas is generally dominated by plastic gas, such as N2, argon, and helium. The unique gas is dominated by chemical substances, and the key is the reflecting gas in integrated circuit manufacturing. For example, silane (SiH4), phosphating trihydrogen (PH3), nitrous oxide (N2O), nitrogen dioxide (NH3), tetrafluoromethane gas (CF4), these gases are mainly involved in the whole process of chip manufacturing Some of the chemicals in it are transformed into these. For example, the use of silane to reflect into silicon dioxide material, the use of tetrafluoromethane gas is the key to dry etching, which reacts with the etched object, and then achieves the purpose of etching.

Electronic special gases are commonly used in industries such as integrated circuits, display information control panels, solar power generation, new energy vehicles, and other industries. In recent years, the technology of the mid-downstream industrial chain has rapidly changed. Especially in the integrated circuit manufacturing industry, with the continuous decrease of process connection points, from 28nm process to 7nm process. At the level of wafer specifications, from 8-inch wafer to 12-inch wafer. Special gas is an important raw material for integrated circuit production. With the rapid technological iteration of the middle and downstream industry chain, the level of refined management of special gas has been continuously improved, especially at the level of purity and precision. Promote. For example, at the level of purity, the general industrial production gas is regulated at 99.99%, but in the whole process of integrated circuit production and manufacturing with excellent technology, the gas purity is regulated above 6N (99.9999%).